Paper Title:

A Monolithic Integrated Pressure Sensor

Periodical Key Engineering Materials (Volume 503)
Main Theme Micro-Nano Technology XIII
Edited by Xiaohao Wang
Pages 8-11
DOI 10.4028/www.scientific.net/KEM.503.8
Citation Zheng Yuan Zhang et al., 2012, Key Engineering Materials, 503, 8
Online since February, 2012
Authors Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu
Keywords CrSi Resistor Networks, Pressure Sensor, Temperature Compensation
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Abstract

pressure sensor, CrSi resistor networks, temperature compensation. Abstract. In this paper, focused on especial requirement monolithic integrated resistance pressure sensor, pressure structure, signal processing circuits and process compatible technology of sensor and IC were studied. The feebleness pressure signal monitoring circuits was designed, high precision CrSi resistor networks was used for temperature compensation of resistance pressure sensor, and a monolithic integrated pressure sensor only 2.3×2.3mm2 was obtained. The measuring results are as follows, measurement range is 5-115kPa, the maximum Vout is more than 4.5V, sensitivity is 1.2%.