Paper Title:

Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing

Periodical Key Engineering Materials (Volume 538)
Main Theme Progress in Functional Materials
Chapter Chapter 2: Electrical Materials
Edited by Yuan Ming Huang
Pages 125-128
DOI 10.4028/
Citation Hirofumi Saito et al., 2013, Key Engineering Materials, 538, 125
Online since January 2013
Authors Hirofumi Saito, Hiroki Komatsuzaki, Ryuta Ikoma, Takayuki Komori, Keigo Kuroda, Yohta Kimura, Yudai Fukushi, Hirotaka Maenosono, Syohei Koide, Masahiro Satano, Yasushiro Nishioka
Keywords Electroosmotic Flow, Hot Embossing, UV Ozone
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Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was pressed into the PMMA substrate at a temperature of 145 °C to form microchannel patterns on the substrate. The depth and width of the microchannels were 50 μm and 100 μm, respectively. Aluminum electrodes were deposited using thermal vacuum deposition. A UV ozone treatment was performed to improve adhesion between the PMMA substrate and a PMMA capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 70 °C, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.5 μl/min when a voltage of 50 V was given between the electrodes separated 8 mm each other.