Paper Title:
Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing

Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was pressed into the PMMA substrate at a temperature of 145 °C to form microchannel patterns on the substrate. The depth and width of the microchannels were 50 μm and 100 μm, respectively. Aluminum electrodes were deposited using thermal vacuum deposition. A UV ozone treatment was performed to improve adhesion between the PMMA substrate and a PMMA capping layer. This UV ozone treatment enhanced adhesion and resulted in the reduction of the adhesion temperature as low as 70 °C, and nearly no deformation of the microchannels was observed. As a result, the electroosmotic flow pump exhibited the flow rate of 0.5 μl/min when a voltage of 50 V was given between the electrodes separated 8 mm each other.

Chapter 2: Electrical Materials
Edited by
Yuan Ming Huang
H. Saito, H. Komatsuzaki, R. Ikoma, T. Komori, K. Kuroda, Y. Kimura, Y. Fukushi, H. Maenosono, S. Koide, M. Satano, Y. Nishioka, "Fabrication of Electroosmotic Flow Pump on Polymethylemethacrylate Substrate Using Hot Embossing", Key Engineering Materials, Vol. 538, pp. 125-128, 2013
Online since
January 2013
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