Formation of ZrO2 and YSZ Layers by Microwave Plasma Assisted MOCVD Process |
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| Journal | Key Engineering Materials (Volumes 61 - 62) |
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| Volume | Inorganic Membranes |
| Edited by | A.J. Burggraaf, J. Charpin and L. Cot |
| Pages | 11-16 |
| DOI | 10.4028/www.scientific.net/KEM.61-62.11 |
| Citation | G. Meng et al., 1992, Key Engineering Materials, 61-62, 11 |
| Authors | G. Meng, C. Cao, W. Yu, D. Peng, K. de Vries, A.J. Burggraaf |
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