Paper Title:
Formation of ZrO2 and YSZ Layers by Microwave Plasma Assisted MOCVD Process
  Abstract

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Periodical
Key Engineering Materials (Volumes 61-62)
Main Theme
Edited by
A.J. Burggraaf, J. Charpin and L. Cot
Pages
11-16
DOI
10.4028/www.scientific.net/KEM.61-62.11
Citation
G. Meng, C. Cao, W. Yu, D. Peng, K. de Vries, A.J. Burggraaf, "Formation of ZrO2 and YSZ Layers by Microwave Plasma Assisted MOCVD Process", Key Engineering Materials, Vols. 61-62, pp. 11-16, 1992
Online since
January 1992
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$32.00
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