Structural Study of Amorphous W/Si Multilayers |
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| Journal | Key Engineering Materials (Volumes 81 - 83) |
|---|---|
| Volume | Amorphous Metallic Materials III |
| Edited by | P. Duhaj, P. Mrafko and P. Svec |
| Pages | 285-290 |
| DOI | 10.4028/www.scientific.net/KEM.81-83.285 |
| Citation | Matej Jergel et al., 1993, Key Engineering Materials, 81-83, 285 |
| Authors | Matej Jergel, M. Brunel, E. Majková, S. Luby |
| Keywords | Rapid Thermal Annealing, Structural Stability, W/Si Multilayers |
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