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Structural Study of Amorphous W/Si Multilayers

Journal Key Engineering Materials (Volumes 81 - 83)
Volume Amorphous Metallic Materials III
Edited by P. Duhaj, P. Mrafko and P. Svec
Pages 285-290
DOI 10.4028/www.scientific.net/KEM.81-83.285
Citation Matej Jergel et al., 1993, Key Engineering Materials, 81-83, 285
Authors Matej Jergel, M. Brunel, E. Majková, S. Luby
Keywords Rapid Thermal Annealing, Structural Stability, W/Si Multilayers
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