Paper Title:
Amorphous WxSiy / Si Multilayers
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 81-83)
Edited by
P. Duhaj, P. Mrafko and P. Svec
Pages
303-310
DOI
10.4028/www.scientific.net/KEM.81-83.303
Citation
I. Vávra, P. Lobotka, R. Senderák, S. Benacka, D. Machajdík, "Amorphous WxSiy / Si Multilayers", Key Engineering Materials, Vols. 81-83, pp. 303-310, 1993
Online since
January 1993
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Price
$32.00
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