Paper Title:
Simulation of Ion Beam-Induced Collisional Processes in Thin Film Titanium Silicide
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 86-87)
Edited by
S. Hampshire, M. Buggy and A. J. Carr
Pages
307-312
DOI
10.4028/www.scientific.net/KEM.86-87.307
Citation
M. O'Connor, G.M. Crean, J.P. Biersack, "Simulation of Ion Beam-Induced Collisional Processes in Thin Film Titanium Silicide", Key Engineering Materials, Vols. 86-87, pp. 307-312, 1993
Online since
July 1993
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Price
$35.00
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