Paper Title:
Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 86-87)
Edited by
S. Hampshire, M. Buggy and A. J. Carr
Pages
345-352
DOI
10.4028/www.scientific.net/KEM.86-87.345
Citation
M. Murtagh, S. Lynch, P.V. Kelly, P.A.F. Herbert, G.M. Crean, "Investigation of the Influence of Gas Pressure on Dry-Etched Induced Damage on Semi-Insulating GaAs Substrates", Key Engineering Materials, Vols. 86-87, pp. 345-352, 1993
Online since
July 1993
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Price
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