Paper Title:
Incoming Inspection of Silicon-on-Insulator Substrates Using Spectroscopic and Single Wavelength Ellipsometry
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 86-87)
Edited by
S. Hampshire, M. Buggy and A. J. Carr
Pages
353-360
DOI
10.4028/www.scientific.net/KEM.86-87.353
Citation
S. Lynch, G.M. Crean, "Incoming Inspection of Silicon-on-Insulator Substrates Using Spectroscopic and Single Wavelength Ellipsometry", Key Engineering Materials, Vols. 86-87, pp. 353-360, 1993
Online since
July 1993
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Price
$32.00
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