Paper Title:
PVD Coatings in the System Si-Al-O-N
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
275-282
DOI
10.4028/www.scientific.net/KEM.89-91.275
Citation
O. Knotek, F. Löffler, W. Beele, "PVD Coatings in the System Si-Al-O-N", Key Engineering Materials, Vols. 89-91, pp. 275-282, 1994
Online since
August 1993
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Price
$32.00
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