Paper Title:
Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
301-306
DOI
10.4028/www.scientific.net/KEM.89-91.301
Citation
J. Chen, H. Arwin, M. Heim, J. Sjöberg, "Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies ", Key Engineering Materials, Vols. 89-91, pp. 301-306, 1994
Online since
August 1993
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Price
$32.00
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