Paper Title:
Surface Modification of Dense Silicon Nitride by Ion Beam Techniques
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
319-326
DOI
10.4028/www.scientific.net/KEM.89-91.319
Citation
C. Taut, M. Herrmann, A. Mucha, "Surface Modification of Dense Silicon Nitride by Ion Beam Techniques", Key Engineering Materials, Vols. 89-91, pp. 319-326, 1994
Online since
August 1993
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Price
$32.00
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