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Synthesis of Si3 N4 And Si3 N4 -SiC Powders by an RF-Induction Plasma

Journal Key Engineering Materials (Volumes 89 - 91)
Volume Silicon Nitride '93
Edited by Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages 41-46
DOI 10.4028/www.scientific.net/KEM.89-91.41
Citation R. Mach et al., 1993, Key Engineering Materials, 89-91, 41
Authors R. Mach, H.-D. Klotz, K.-D. Suhrke, H. Drost, F. Oleszak, G. Lacayo, K. Sulzewesky, I. Dörfel
Keywords Nanodisperse Powders, Plasma Synthesis, Powder Characterization, Powder Synthesis, Si3N4-SiC Composites
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