Paper Title:
Synthesis of Si3 N4 And Si3 N4 -SiC Powders by an RF-Induction Plasma
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
41-46
DOI
10.4028/www.scientific.net/KEM.89-91.41
Citation
R. Mach, H.-D. Klotz, K.-D. Suhrke, H. Drost, F. Oleszak, G. Lacayo, K. Sulzewesky, I. Dörfel, "Synthesis of Si3 N4 And Si3 N4 -SiC Powders by an RF-Induction Plasma", Key Engineering Materials, Vols. 89-91, pp. 41-46, 1994
Online since
August 1993
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