Paper Title:
Ultra Fine Crystalline Silicon Nitride from a Continuous Gas Phase Plasma Route
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
47-54
DOI
10.4028/www.scientific.net/KEM.89-91.47
Citation
T.A. Jennett, P.D. Harmsworth, A.G. Jones, "Ultra Fine Crystalline Silicon Nitride from a Continuous Gas Phase Plasma Route ", Key Engineering Materials, Vols. 89-91, pp. 47-54, 1994
Online since
August 1993
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Price
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