Paper Title:
Ultramicrohardness Measurement of Silicon Nitride Films
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
547-552
DOI
10.4028/www.scientific.net/KEM.89-91.547
Citation
X. Cai, J. F. Wang, P.N. Zhou, X.H. Liu, Z. Zhen, "Ultramicrohardness Measurement of Silicon Nitride Films", Key Engineering Materials, Vols. 89-91, pp. 547-552, 1994
Online since
August 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.