Paper Title:
Analysis of Buried Nitride Layers Produced by Ion Implantation
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
749-750
DOI
10.4028/www.scientific.net/KEM.89-91.749
Citation
D. Fröse, D. Kollewe, "Analysis of Buried Nitride Layers Produced by Ion Implantation", Key Engineering Materials, Vols. 89-91, pp. 749-750, 1994
Online since
August 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.