From Octamethylcyclotetrasilazane (OMCTS) via Crystalline Silicon Nitride Imide Si2N2NH to α-Si3N4 |
| Journal |
Key Engineering Materials (Volumes 89 - 91) |
| Volume |
Silicon Nitride '93 |
| Edited by |
Michael J. Hoffmann, Paul F. Becher and Günther Petzow |
| Pages |
81-86 |
| DOI |
10.4028/www.scientific.net/KEM.89-91.81 |
| Citation |
S. Schaible et al., 1993, Key Engineering Materials, 89-91, 81 |
| Authors |
S. Schaible, R. Riedel, Fritz Aldinger, U. Klingebiel |
| Keywords |
Silazane, Silicon Nitride Imide, Synthesis |
| Full Paper |
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