Paper Title:
From Octamethylcyclotetrasilazane (OMCTS) via Crystalline Silicon Nitride Imide Si2N2NH to α-Si3N4
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
81-86
DOI
10.4028/www.scientific.net/KEM.89-91.81
Citation
S. Schaible, R. Riedel, F. Aldinger, U. Klingebiel, "From Octamethylcyclotetrasilazane (OMCTS) via Crystalline Silicon Nitride Imide Si2N2NH to α-Si3N4", Key Engineering Materials, Vols. 89-91, pp. 81-86, 1994
Online since
August 1993
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