Paper Title:
Crystallization of Amorphous Silicon Carbonitride Investigated by Transmission Electron Microscopy (TEM)
  Abstract

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Periodical
Key Engineering Materials (Volumes 89-91)
Main Theme
Edited by
Michael J. Hoffmann, Paul F. Becher and Günther Petzow
Pages
95-100
DOI
10.4028/www.scientific.net/KEM.89-91.95
Citation
M. Friess, J. Bill, F. Aldinger, D.V. Szabó, R. Riedel, "Crystallization of Amorphous Silicon Carbonitride Investigated by Transmission Electron Microscopy (TEM) ", Key Engineering Materials, Vols. 89-91, pp. 95-100, 1994
Online since
August 1993
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