Paper Title:
Detection of Absolute Number Densities of Atomic Hydrogen in Diamond-Like Carbon (DLC) Deposition Plasmas
  Abstract

  Info
Periodical
Key Engineering Materials (Volumes 99-100)
Edited by
S. Hampshire, M. Buggy, B. Meenan and N. Brown
Pages
363-370
DOI
10.4028/www.scientific.net/KEM.99-100.363
Citation
R.C. Cheshire, V. Kornas, H.F. Döbele, K. Donnelly, D. P. Dowling, W.G. Graham, T. Morrow, T. O'Brien, "Detection of Absolute Number Densities of Atomic Hydrogen in Diamond-Like Carbon (DLC) Deposition Plasmas", Key Engineering Materials, Vols. 99-100, pp. 363-370, 1995
Online since
March 1995
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