Paper Title:
The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon
  Abstract

  Info
Periodical
Main Theme
Edited by
A. L. Laskar et al.
Pages
109-131
DOI
10.4028/www.scientific.net/MSF.1.109
Citation
R.B. Fair, "The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon", Materials Science Forum, Vol. 1, pp. 109-131, 1984
Online since
January 1984
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Price
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