The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon |
|
| Journal | Materials Science Forum (Volume 1) |
|---|---|
| Volume | Diffusion in Solids |
| Edited by | A. L. Laskar et al. |
| Pages | 109-131 |
| DOI | 10.4028/www.scientific.net/MSF.1.109 |
| Citation | R.B. Fair, 1984, Materials Science Forum, 1, 109 |
| Authors | R.B. Fair |
| Full Paper | 
Get the full paper by clicking here
|
First page example
