Paper Title:
Defects Related to Nitrogen Implantation in Silicon Single Crystals
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
1147-1152
DOI
10.4028/www.scientific.net/MSF.10-12.1147
Citation
M. Bode, A. Jakubowicz, H.U. Habermeier, "Defects Related to Nitrogen Implantation in Silicon Single Crystals", Materials Science Forum, Vols. 10-12, pp. 1147-1152, 1986
Online since
January 1986
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Price
$32.00
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