Paper Title:
Investigation of the Lattice Defects in P Ion Implanted Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
1165-1170
DOI
10.4028/www.scientific.net/MSF.10-12.1165
Citation
H. Bender, D. Avau, W. Vandervorst, J. Van Landuyt, H.E. Maes, "Investigation of the Lattice Defects in P Ion Implanted Silicon", Materials Science Forum, Vols. 10-12, pp. 1165-1170, 1986
Online since
January 1986
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Price
$32.00
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