Paper Title:
Photoluminescence of Defects Produced by Reactive Ion Etching of Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
1253-1258
DOI
10.4028/www.scientific.net/MSF.10-12.1253
Citation
G.A. Northrop, G.S. Oehrlein, "Photoluminescence of Defects Produced by Reactive Ion Etching of Silicon", Materials Science Forum, Vols. 10-12, pp. 1253-1258, 1986
Online since
January 1986
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Price
$32.00
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