Nature and Generation Mechanism of Butterfly-Type Intrinsic Gettering Centers in Oxygen-Free Silicon Crystals |
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| Journal | Materials Science Forum (Volumes 10 - 12) |
|---|---|
| Volume | Defects in Semiconductors 14 |
| Edited by | H.J. von Bardeleben |
| Pages | 145-150 |
| DOI | 10.4028/www.scientific.net/MSF.10-12.145 |
| Citation | O. Ueda et al., 1986, Materials Science Forum, 10-12, 145 |
| Authors | O. Ueda, K. Nauka, J. Lagowski, H.C. Gatos |
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