Paper Title:
Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
151-156
DOI
10.4028/www.scientific.net/MSF.10-12.151
Citation
R. Kühnapfel, W. Schröter, D. Gilles, "Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering", Materials Science Forum, Vols. 10-12, pp. 151-156, 1986
Online since
January 1986
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Price
$32.00
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