Distribution of Cobalt in Silicon after Phosphorous Diffusion Gettering |
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| Journal | Materials Science Forum (Volumes 10 - 12) |
|---|---|
| Volume | Defects in Semiconductors 14 |
| Edited by | H.J. von Bardeleben |
| Pages | 151-156 |
| DOI | 10.4028/www.scientific.net/MSF.10-12.151 |
| Citation | R. Kühnapfel et al., 1986, Materials Science Forum, 10-12, 151 |
| Authors | R. Kühnapfel, Wolfgang Schröter, D. Gilles |
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