Transient Defects Kinetics during Silicon Oxidation and Diffusion Phenomena |
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| Journal | Materials Science Forum (Volumes 10 - 12) |
|---|---|
| Volume | Defects in Semiconductors 14 |
| Edited by | H.J. von Bardeleben |
| Pages | 157-162 |
| DOI | 10.4028/www.scientific.net/MSF.10-12.157 |
| Citation | D. Mathiot, 1986, Materials Science Forum, 10-12, 157 |
| Authors | D. Mathiot |
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