Paper Title:
The Role of Point Defects in the Nucleation of Film Edge Induced Dislocations in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
757-762
DOI
10.4028/www.scientific.net/MSF.10-12.757
Citation
J. Vanhellemont, C. Claeys, J. Van Landuyt, "The Role of Point Defects in the Nucleation of Film Edge Induced Dislocations in Silicon", Materials Science Forum, Vols. 10-12, pp. 757-762, 1986
Online since
January 1986
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Price
$32.00
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