Paper Title:
On the Influence of Doping and Annealing on Oxygen-Related Defects in Silicon
  Abstract

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Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
869-874
DOI
10.4028/www.scientific.net/MSF.10-12.869
Citation
P. Mascher, S. Dannefaer, D. Kerr, S.K. Hahn, "On the Influence of Doping and Annealing on Oxygen-Related Defects in Silicon", Materials Science Forum, Vols. 10-12, pp. 869-874, 1986
Online since
January 1986
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Price
$32.00
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