Paper Title:
Ion-Implanted Oxygen Isotopes in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 10-12)
Edited by
H.J. von Bardeleben
Pages
935-940
DOI
10.4028/www.scientific.net/MSF.10-12.935
Citation
H.J. Stein, "Ion-Implanted Oxygen Isotopes in Silicon", Materials Science Forum, Vols. 10-12, pp. 935-940, 1986
Online since
January 1986
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Price
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