Paper Title:
Defect Distribution across 6-Inch CZ-Silicon Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 105-110)
Edited by
Zs. Kajcsos and Cs. Szeles
Pages
1185-1188
DOI
10.4028/www.scientific.net/MSF.105-110.1185
Citation
W. Puff, P. Mascher, S.K. Hahn, K.H. Cho, B.Y. Lee, "Defect Distribution across 6-Inch CZ-Silicon Wafers", Materials Science Forum, Vols. 105-110, pp. 1185-1188, 1992
Online since
January 1992
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Price
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