Paper Title:
Implantation and Diffusion in Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 105-110)
Edited by
Zs. Kajcsos and Cs. Szeles
Pages
1431-1434
DOI
10.4028/www.scientific.net/MSF.105-110.1431
Citation
M. R. Poulsen, G. Laricchia, M. Charlton, K.O. Jensen, A.B. Walker, "Implantation and Diffusion in Thin Films", Materials Science Forum, Vols. 105-110, pp. 1431-1434, 1992
Online since
January 1992
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Price
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