Paper Title:
Annealing of Silicon Implantation Damage in Indium Phosphide
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 105-110)
Edited by
Zs. Kajcsos and Cs. Szeles
Pages
1435-1438
DOI
10.4028/www.scientific.net/MSF.105-110.1435
Citation
P.J. Simpson, U.G. Akano, P.J. Schultz, I.V. Mitchell, "Annealing of Silicon Implantation Damage in Indium Phosphide", Materials Science Forum, Vols. 105-110, pp. 1435-1438, 1992
Online since
January 1992
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Price
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