Paper Title:
Depth Profiling of Defects in Low Temperature MBE-Grown Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 105-110)
Edited by
Zs. Kajcsos and Cs. Szeles
Pages
301-308
DOI
10.4028/www.scientific.net/MSF.105-110.301
Citation
T.E. Jackman, G.C. Aers, J.P. McCaffrey, D.T. Britton, P. Willutzki, P.J. Simpson, P.J. Schultz, P. Mascher, "Depth Profiling of Defects in Low Temperature MBE-Grown Silicon ", Materials Science Forum, Vols. 105-110, pp. 301-308, 1992
Online since
January 1992
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