Paper Title:
A Study of Structural Defects in Sputtered ZrN Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 105-110)
Edited by
Zs. Kajcsos and Cs. Szeles
Pages
913-916
DOI
10.4028/www.scientific.net/MSF.105-110.913
Citation
J. Brunner, A. J. Perry, J.P. Schaffer, W.D. Sproul, "A Study of Structural Defects in Sputtered ZrN Films", Materials Science Forum, Vols. 105-110, pp. 913-916, 1992
Online since
January 1992
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.