Paper Title:
Self-Modulating Incorporation of Sb in Si/SiGe Superlattices during Molecular Beam Epitaxial Growth
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
159-164
DOI
10.4028/www.scientific.net/MSF.117-118.159
Citation
K. Fujita, S. Fukatsu, N. Usami, H. Yaguchi, Y. Shiraki, R. Ito, "Self-Modulating Incorporation of Sb in Si/SiGe Superlattices during Molecular Beam Epitaxial Growth ", Materials Science Forum, Vols. 117-118, pp. 159-164, 1993
Online since
January 1993
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.