Paper Title:
Impurity Control in Silicon Crystals for G-Bit Scale Integration
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
17-28
DOI
10.4028/www.scientific.net/MSF.117-118.17
Citation
T. Abe, "Impurity Control in Silicon Crystals for G-Bit Scale Integration ", Materials Science Forum, Vols. 117-118, pp. 17-28, 1993
Online since
January 1993
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Price
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