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Impurity Control in Silicon Crystals for G-Bit Scale Integration

Journal Materials Science Forum (Volumes 117 - 118)
Volume Shallow Impurities in Semiconductors V
Edited by Tsunemasa Taguchi
Pages 17-28
DOI 10.4028/www.scientific.net/MSF.117-118.17
Authors Toshihiko Abe
Keywords Defect, Oxygen, Silicon, SOI, Surface
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