Impurity Control in Silicon Crystals for G-Bit Scale Integration |
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| Journal | Materials Science Forum (Volumes 117 - 118) |
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| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 17-28 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.17 |
| Authors | Toshihiko Abe |
| Keywords | Defect, Oxygen, Silicon, SOI, Surface |
| Full Paper | 
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