Impurity Control in Silicon Crystals for G-Bit Scale Integration
| Periodical | Materials Science Forum (Volumes 117 - 118) |
|---|---|
| Main Theme | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 17-28 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.17 |
| Citation | Toshihiko Abe, 1993, Materials Science Forum, 117-118, 17 |
| Authors | Toshihiko Abe |
| Keywords | Defect, Oxygen, Silicon, SOI, Surface |
| Price | US$ 28,- |