Paper Title:
Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals
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Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
183-188
DOI
10.4028/www.scientific.net/MSF.117-118.183
Citation
Y. Kitagawara, K. Takamizawa, T. Takenaka, "Accurate Evaluation Techniques of the Interstitial Oxygen Concentrations in the Oxygen Precipitated and the Low-Resistivity CZ-Si Crystals ", Materials Science Forum, Vols. 117-118, pp. 183-188, 1993
Online since
January 1993
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