Paper Title:
Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si
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Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
213-218
DOI
10.4028/www.scientific.net/MSF.117-118.213
Citation
W. Götz, G. Pensl, W. Zulehner, "Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si ", Materials Science Forum, Vols. 117-118, pp. 213-218, 1993
Online since
January 1993
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