Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si |
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| Journal | Materials Science Forum (Volumes 117 - 118) |
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| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 213-218 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.213 |
| Citation | W. Götz et al., 1993, Materials Science Forum, 117-118, 213 |
| Authors | W. Götz, Gerhard Pensl, W. Zulehner |
| Keywords | Donors, Impurity |
| Full Paper | 
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