Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals |
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| Journal | Materials Science Forum (Volumes 117 - 118) |
|---|---|
| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 219-224 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.219 |
| Citation | A. Hara et al., 1993, Materials Science Forum, 117-118, 219 |
| Authors | A. Hara, M. Aoki, T. Fukuda, A. Ohsawa |
| Keywords | Carbon, Donor, Nitrogen, Oxygen, Silicon, Thermal Donor |
| Full Paper | 
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