Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals |
| Journal |
Materials Science Forum (Volumes 117 - 118) |
| Volume |
Shallow Impurities in Semiconductors V |
| Edited by |
Tsunemasa Taguchi |
| Pages |
225-230 |
| DOI |
10.4028/www.scientific.net/MSF.117-118.225 |
| Citation |
Atsushi Ikari et al., 1993, Materials Science Forum, 117-118, 225 |
| Authors |
Atsushi Ikari, Hiroyo Haga, O. Yoda, Akira Uedono, Yusuke Ujihira |
| Keywords |
Electron Irradiation, Oxygen Cluster, Positron Annihilation |
| Full Paper |
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