Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals |
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| Journal | Materials Science Forum (Volumes 117 - 118) |
|---|---|
| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 231-236 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.231 |
| Citation | M. Schrems, 1993, Materials Science Forum, 117-118, 231 |
| Authors | M. Schrems |
| Keywords | Modelling Denuded Zone, Oxygen Precipitation, Simulation |
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