Paper Title:
Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
237-242
DOI
10.4028/www.scientific.net/MSF.117-118.237
Citation
T. Akane, S. Matsumoto, I. Mizushima, "Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon ", Materials Science Forum, Vols. 117-118, pp. 237-242, 1993
Online since
January 1993
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Price
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