Thermal Process Dependence of Chromium Donor/Acceptor in Silicon |
|
| Journal | Materials Science Forum (Volumes 117 - 118) |
|---|---|
| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 261-266 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.261 |
| Citation | M. Takiyama et al., 1993, Materials Science Forum, 117-118, 261 |
| Authors | M. Takiyama, Shigehiro Ohtsuka, M. Tachimori |
| Keywords | Acceptor, Chromium, Impurity, Silicon |
| Full Paper | 
Get the full paper by clicking here
|
First page example
