Paper Title:
Thermal Process Dependence of Chromium Donor/Acceptor in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
261-266
DOI
10.4028/www.scientific.net/MSF.117-118.261
Citation
M. Takiyama, S. Ohtsuka, M. Tachimori, "Thermal Process Dependence of Chromium Donor/Acceptor in Silicon ", Materials Science Forum, Vols. 117-118, pp. 261-266, 1993
Online since
January 1993
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Price
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