Paper Title:
Defect Observation in Silicon Surface Layers by Surface Wave Resonance in RHEED
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
273-278
DOI
10.4028/www.scientific.net/MSF.117-118.273
Citation
K. Ueda, "Defect Observation in Silicon Surface Layers by Surface Wave Resonance in RHEED ", Materials Science Forum, Vols. 117-118, pp. 273-278, 1993
Online since
January 1993
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Price
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