Defect Observation in Silicon Surface Layers by Surface Wave Resonance in RHEED |
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| Journal | Materials Science Forum (Volumes 117 - 118) |
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| Volume | Shallow Impurities in Semiconductors V |
| Edited by | Tsunemasa Taguchi |
| Pages | 273-278 |
| DOI | 10.4028/www.scientific.net/MSF.117-118.273 |
| Citation | Koushirou Ueda, 1993, Materials Science Forum, 117-118, 273 |
| Authors | Koushirou Ueda |
| Keywords | RHEED, Surface Wave Resonance |
| Full Paper | 
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