Paper Title:
Impurity Diffusion into GaAs through the SiO2 Protective Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
417-422
DOI
10.4028/www.scientific.net/MSF.117-118.417
Citation
D.K. Gautam, Y. Shimogaki, Y. Nakano, K. Tada, "Impurity Diffusion into GaAs through the SiO2 Protective Layers ", Materials Science Forum, Vols. 117-118, pp. 417-422, 1993
Online since
January 1993
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