Paper Title:
Morphology of Oxide Precipitates in Czochralski Silicon Crystals
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
523-524
DOI
10.4028/www.scientific.net/MSF.117-118.523
Citation
K. Sueoka, N. Ikeda, T. Yamamoto, S. Kobayashi, "Morphology of Oxide Precipitates in Czochralski Silicon Crystals ", Materials Science Forum, Vols. 117-118, pp. 523-524, 1993
Online since
January 1993
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Price
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