Paper Title:
Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 117-118)
Edited by
Tsunemasa Taguchi
Pages
75-80
DOI
10.4028/www.scientific.net/MSF.117-118.75
Citation
O. Sugino, A. Oshiyama, "Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon ", Materials Science Forum, Vols. 117-118, pp. 75-80, 1993
Online since
January 1993
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Price
$32.00
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