Paper Title:

Effect of External Pressure and Internal Stress on Imyurity Diffusion in Silicon

Periodical Materials Science Forum (Volumes 117 - 118)
Main Theme Shallow Impurities in Semiconductors V
Edited by Tsunemasa Taguchi
Pages 75-80
DOI 10.4028/www.scientific.net/MSF.117-118.75
Citation O. Sugino et al., 1993, Materials Science Forum, 117-118, 75
Authors O. Sugino, Atsushi Oshiyama
Keywords Impurity Diffusion, Pressure
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