Paper Title:
Modeling of Si3N4 Thin Layers Deposition out of Gaseous Phase
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 126-128)
Edited by
Ph. Komninou and A. Rocher
Pages
829-832
DOI
10.4028/www.scientific.net/MSF.126-128.829
Citation
S.P. Kostenko, Y. A. Potchkin, G.D. Tishchenko, "Modeling of Si3N4 Thin Layers Deposition out of Gaseous Phase", Materials Science Forum, Vols. 126-128, pp. 829-832, 1993
Online since
January 1993
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Price
$32.00
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