Paper Title:
Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 133-136)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
873-878
DOI
10.4028/www.scientific.net/MSF.133-136.873
Citation
P. Gergaud, J.J. Bacmann, "Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering", Materials Science Forum, Vols. 133-136, pp. 873-878, 1993
Online since
January 1993
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