Paper Title:
XRD-Investigations of Phase-Formation in High Dose Fe- and Co-Ion Co-implanted Si (100) Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 133-136)
Edited by
R. Delhez and E.J. Mittemeijer
Pages
903-906
DOI
10.4028/www.scientific.net/MSF.133-136.903
Citation
G. Querner, A. Danzig, D. Panknin, E. Wieser, "XRD-Investigations of Phase-Formation in High Dose Fe- and Co-Ion Co-implanted Si (100) Wafers", Materials Science Forum, Vols. 133-136, pp. 903-906, 1993
Online since
January 1993
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