Paper Title:
Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 140-142)
Edited by
J. J. Pouch and S. A. Alterovitz
Pages
107-120
DOI
10.4028/www.scientific.net/MSF.140-142.107
Citation
M. Capitelli, G. Capriati, M. Dilonardo, C. Gorse, S. Longo, "Theoretical Characterization of Electron Energy Distribution Function in RF Plasmas", Materials Science Forum, Vols. 140-142, pp. 107-120, 1993
Online since
October 1993
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Price
$32.00
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